Benzocyclobutene (DVS-BCB) polymer as an interlayer...

Microelectronic Engineering 1997 Vol. 33; Iss. 1-4

Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material

Michael E. Mills, Paul Townsend, Dan Castillo, Steve Martin, Albert Achen
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Volume:
33
Year:
1997
Language:
english
Pages:
8
DOI:
10.1016/s0167-9317(96)00061-5
File:
PDF, 468 KB
english, 1997
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