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Electrical properties of 100 nm pitch CrAu fine electrodes with 40 nm width on GaInAs toward hot electron interference/diffraction devices
Hiroo Hongo, Hiroaki Tanaka, Yasuyuki Miyamoto, Toshihiko Otake, Jiroo Yoshinaga, Kazuhito FuruyaVolume:
35
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(96)00119-0
File:
PDF, 315 KB
english, 1997