Nanoscale etching of resists in view of a mechanistic...

Microelectronic Engineering 1997 Vol. 35; Iss. 1-4

Nanoscale etching of resists in view of a mechanistic framework

Falco C.M.J.M. van Delft, J. Ben Giesbers, Gert-Jan Nienhuis
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
35
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(96)00155-4
File:
PDF, 312 KB
english, 1997
Conversion to is in progress
Conversion to is failed