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Gel formation theory approach for the modelling of negative chemically amplified e-beam resists
G. Patsis, I. Raptis, N. Glezos, P. Argitis, M. Hatzakis, C.J. Aidinis, M. Gentili, R. MaggioraVolume:
35
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(96)00178-5
File:
PDF, 272 KB
english, 1997