![](/img/cover-not-exists.png)
Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
J. Brugger, G. Beljakovic, M. Despont, N.F. de Rooij, P. VettigerVolume:
35
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(96)00210-9
File:
PDF, 286 KB
english, 1997