Enriching of the Si3N4-thermal oxide interface by excess silicon in
V.A. Gritsenko, Yu.N. Morokov, Yu.N. Novikov, I.P. Petrenko, S.N. Svitasheva, H. WongVolume:
36
Year:
1997
Language:
english
Pages:
2
DOI:
10.1016/s0167-9317(97)00030-0
File:
PDF, 100 KB
english, 1997