Impurity gettering effects in separation-by-implanted-oxygen (SIMOX) wafers: what getters what, where and how
R.A. Yankov, J.R. Kaschny, P.F.P. Fichtner, A. Mücklich, U. Kreißig, W. SkorupaVolume:
36
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(97)00032-4
File:
PDF, 313 KB
english, 1997