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Thin oxide growth on 6H-silicon carbide
Vickram R. Vathulya, William E. Wagner, Floyd C. Miller, Marvin H. WhiteVolume:
36
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(97)00042-7
File:
PDF, 249 KB
english, 1997