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Rapid annealing measurements in fully-depleted NMOS/SOI
O. Gruber, V. Ferlet-Cavrois, Ph. Paillet, O. Musseau, C. Raynaud, J.L. PelloieVolume:
36
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(97)00058-0
File:
PDF, 273 KB
english, 1997