Determination of the thicknesses of gate oxide and active layer in SOI structures from CV measurements
J. Gibki, A. Jakubowski, M. JurczakVolume:
36
Year:
1997
Language:
english
Pages:
3
DOI:
10.1016/s0167-9317(97)00082-8
File:
PDF, 164 KB
english, 1997