New approaches to optical proximity correction in photolithography
Jinglei Du, Qizhong Huang, Jingqin Su, Yongkang Guo, Zheng CuiVolume:
46
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(99)00018-0
File:
PDF, 266 KB
english, 1999