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Cellector: A new software tool for the support of cell projection in combination with variable shape electron beam lithography for mask and direct write applications
H. Hartmann, R. Steinmetz, T. Waas, P. Hahmann, Ch. EhrlichVolume:
46
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(99)00061-1
File:
PDF, 690 KB
english, 1999