Modified AlAs epitaxial layers for use as pattern transfer masks
C.J.M. Smith, T.F. Krauss, S.K. Murad, C.D.W. Wilkinson, A. Boyd, C.R. Stanley, M. Dawson, R.M. De La RueVolume:
46
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(99)00096-9
File:
PDF, 947 KB
english, 1999