A design and fabrication of a 3D force sensitive microprobe for surface characterization
P.B. Grabiec, R. Sunyk, F. Shi, G. Popovic, T. Gotszalk, P. Hudek, P. Dumania, I.W. RangelowVolume:
46
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0167-9317(99)00120-3
File:
PDF, 1.49 MB
english, 1999