Initial stage of adsorption for organic carbons and native...

Applied Surface Science 2000 Vol. 159-160; Iss. none

Initial stage of adsorption for organic carbons and native oxide growth on Si wafer

Naoto Matsuo, Naoya Kawamoto, Daisuke Aihara, Tadaki Miyoshi
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Volume:
159-160
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(00)00044-1
File:
PDF, 106 KB
english, 2000
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