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In-situ monitoring of PE-CVD growth of TiO2 films with laser Raman spectroscopy
K Nishida, K Morisawa, A Hiraki, S Muraishi, T KatodaVolume:
159-160
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(00)00067-2
File:
PDF, 561 KB
english, 2000