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In situ gravimetric monitoring of halogen transport atomic layer epitaxy of cubic-GaN
Yoshinao Kumagai, Miho Mayumi, Akinori Koukitu, Hisashi SekiVolume:
159-160
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(00)00120-3
File:
PDF, 450 KB
english, 2000