The electrical field effect on the growth of titanium oxide...

Applied Surface Science 1997 Vol. 112; Iss. none

The electrical field effect on the growth of titanium oxide layers by ML-ALE

V.E Drozd, N.N Kopilov, V.B Aleskovski
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Volume:
112
Year:
1997
Pages:
6
DOI:
10.1016/s0169-4332(96)00976-2
File:
PDF, 387 KB
1997
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