Modifying ALE grown In2O3 films by benzoyl fluoride pulses

Applied Surface Science 1997 Vol. 112; Iss. none

Modifying ALE grown In2O3 films by benzoyl fluoride pulses

Timo Asikainen, Mikko Ritala, Wei-Min Li, Reijo Lappalainen, Markku Leskelä
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Volume:
112
Year:
1997
Pages:
5
DOI:
10.1016/s0169-4332(96)00986-5
File:
PDF, 332 KB
1997
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