Effect of plasma oxidized Al prelayer for the epitaxial...

Effect of plasma oxidized Al prelayer for the epitaxial growth of Al2O3 films on Si using magnetron sputtering

Kiyoteru Hayama, Hidenori Ohyama, Tomoyuki Okuhara, Makoto Ishida
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Volume:
117-118
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(97)80132-8
File:
PDF, 326 KB
english, 1997
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