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AlN epitaxial growth on atomically flat initially nitrided α-Al2O3 wafer
Takumi Suetsugu, Tsuyoshi Yamazaki, Shuichi Tomabechi, Kazuhiko Wada, Kazuya Masu, Kazuo TsubouchiVolume:
117-118
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(97)80139-0
File:
PDF, 570 KB
english, 1997