Kinetic studies on thermal decomposition of MOVPE sources using fourier transform infrared spectroscopy
M. Sugiyama, K. Kusunoki, Y. Shimogaki, S. Sudo, Y. Nakano, H. Nagamoto, K. Sugawara, K. Tada, H. KomiyamaVolume:
117-118
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(97)80176-6
File:
PDF, 571 KB
english, 1997