Nucleation and growth behavior of chromium nitride film deposited on various substrates by magnetron sputtering
Min J. Jung, Kyung H. Nam, Yun M. Jung, Jeon G. HanVolume:
171
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(03)00236-6
File:
PDF, 1.95 MB
english, 2002