Volume 171; Issue 1-3

Surface and Coatings Technology

Volume 171; Issue 1-3

1

Preface

Prof.K.W. Whang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 31 KB

english, 2002

2

Grain size refinement of the diamond film deposited on the WC–Co cutting inserts using direct current biasing

Jong-Keuk Park, Wook-Seong Lee, Young-Joon Baik

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.58 MB

english, 2002

3

Epitaxial cobalt silicide formation using a Co/TiSix bilayer on Si (1 0 0) by sputtering

Jin Jung Jeong, Jongmin Lim, Chongmu Lee

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 488 KB

english, 2002

4

Initial deposition stage of LiNb0.5Ta0.5O3 films in thermal plasma CVD

T. Yamaki, H. Yamamoto, S.A. Kulinich, K. Terashima

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 786 KB

english, 2002

5

Effect of intrinsic properties of ceramic coatings on fatigue behavior of Cr–Mo–V steels

K.R. Kim, C.M. Suh, R.I. Murakami, C.W. Chung

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 383 KB

english, 2002

6

Preparation of TiN films at room temperature by inductively coupled plasma assisted chemical vapor deposition

Dong-Kak Lee, Jung-Joong Lee, Junghoon Joo

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 509 KB

english, 2002

7

The effect of pulsed magnetron sputtering on the properties of indium tin oxide thin films

Man-Soo Hwang, Hye Jung Lee, Heui Seob Jeong, Yong Woon Seo, Sang Jik Kwon

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 762 KB

english, 2002

8

Refractive index control of core layer using PECVD and FHD for silica optical waveguide

Y.T. Kim, S.M. Cho, Y.G. Seo, H.D. Yoon, Y.M. Im, S.J. Suh, D.H. Yoon

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 389 KB

english, 2002

9

Characterization of low-dielectric-constant SiOC thin films deposited by PECVD for interlayer dielectrics of multilevel interconnection

Hyeong Joon Kim, Qingyi Shao, Yoon-Hae Kim

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 210 KB

english, 2002

10

Hydrogenated amorphous and crystalline SiC thin films grown by RF-PECVD and thermal MOCVD; comparative study of structural and optical properties

C.-K. Jung, D.-C. Lim, H.-G. Jee, M.-G. Park, S.-J. Ku, K.-S. Yu, B. Hong, S.-B. Lee, J.-H. Boo

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 870 KB

english, 2002

11

Microstructure and optical properties of MgO films synthesized by closed-field unbalanced magnetron sputtering with additional electron emission

Kyung H. Nam, Jeon G. Han

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 364 KB

english, 2002

12

Nucleation and growth behavior of chromium nitride film deposited on various substrates by magnetron sputtering

Min J. Jung, Kyung H. Nam, Yun M. Jung, Jeon G. Han

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.95 MB

english, 2002

13

A study on formation of Al and Al2O3 on the porous paper by DC magnetron sputtering

Yun M. Chung, Min J. Jung, Kyung H. Nam, Jeon G. Han, Seung H. Baeg, Se H. Yang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.56 MB

english, 2002

14

The physiochemical properties of TiOxNy films with controlled oxygen partial pressure

Min J. Jung, Kyung H. Nam, Yun M. Chung, Jin H. Boo, Jeon G. Han

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 454 KB

english, 2002

15

Optimum substrate bias condition for TiN thin film deposition using an ECR sputter system

Youl-Moon Sung, Hee-Je Kim

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 716 KB

english, 2002

16

Effects of the thickness of Ti buffer layer on the mechanical properties of TiN coatings

G.S. Kim, S.Y. Lee, J.H. Hahn, B.Y. Lee, J.G. Han, J.H. Lee, S.Y. Lee

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.78 MB

english, 2002

17

Synthesis of CrN/AlN superlattice coatings using closed-field unbalanced magnetron sputtering process

Gwang S. Kim, Sang Y. Lee, Jun H. Hahn, Sang Y. Lee

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 496 KB

english, 2002

18

The RF plasma polymer of lysine and the growth of human nerve cells on its surface

Xiangfen Feng, Jing Zhang, Hankun Xie, Qunhua Hu, Qian Huang, Wenwen Liu

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 798 KB

english, 2002

19

Comparison of optical and electrical properties of BON and Ti-BON thin films prepared by PAMOCVD method

D.-C. Lim, G.C. Chen, J.-H. Boo

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 133 KB

english, 2002

20

Preparation and characterization of TiN coatings produced by combination of PI3D and ICP assisted magnetron PVD

S.A. Nikiforov, K.W. Urm, G.H. Kim, G.H. Rim, S.H. Lee

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 858 KB

english, 2002

21

Fundamental study on plasma deposition manufacturing

Haiou Zhang, Jipeng Xu, Guilan Wang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.46 MB

english, 2002

22

Ion dynamics of pulsed plasma source ion implantation in the sheath of a hemispherical bowl-shaped target

Chengsen Liu, Dezhen Wang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 178 KB

english, 2002

23

Three-dimensional flow and heat transfer in thermal plasma systems

Xi Chen, He-Ping Li

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 404 KB

english, 2002

24

Experimental analysis of a DC–RF hybrid plasma flow

Kohtaro Kawajiri, Takehiko Sato, Hideya Nishiyama

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 464 KB

english, 2002

25

Stability of weak discharge at Y-reset period in plasma display panel discharge

Su-Bin Song, Pil-Yong Park, Han-Yong Lee, Jeong Hyun Seo, Kyung Doo Kang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 225 KB

english, 2002

26

Development of the RF plasma source at atmospheric pressure

Jung G. Kang, Hyoung S. Kim, Sung W. Ahn, Han S. Uhm

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 167 KB

english, 2002

27

Motion and heating of non-spherical particles in a plasma jet

Dong-Yan Xu, Xin-Can Wu, Xi Chen

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 166 KB

english, 2002

28

Numerical investigation of a low-electron-temperature ECR plasma in Ar/N2 mixtures

Hiroshi Muta, Mayuko Koga, Nao Itagaki, Yoshinobu Kawai

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 132 KB

english, 2002

29

Development of shielded cathodic arc deposition with a superconductor shield

Hirofumi Takikawa, Nobuhide Miyakawa, Tateki Sakakibara

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.05 MB

english, 2002

30

Uniformity of VHF plasma produced with ladder shaped electrode

Hiroshi Mashima, Yoshiaki Takeuchi, Matsuhei Noda, Masayoshi Murata, Hiroshi Naitou, Ikutaro Kawasaki, Yoshinobu Kawai

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 792 KB

english, 2002

31

Effect of electron collisions on the plasma–sheath formation

S.W. Kang, K.W. Min, E.S. Lee, J. Seon

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 121 KB

english, 2002

32

Studies of a magnetic null discharge plasma for sputtering application

Youl-Moon Sung, Masahisa Otsubo, Chikahisa Honda

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 712 KB

english, 2002

33

Three-dimensional heating model of inductively coupled plasma with rectangular geometry

Su-Bin Song, Nam Sik Yoon

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 676 KB

english, 2002

34

Analytical studies on MHD oscillatory flow of a micropolar fluid over a vertical porous plate

Youn J. Kim, J.-C. Lee

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 152 KB

english, 2002

35

A common-path fast-scanning interferometer system for thin-film surface profiling

M.S. Cheon, Y.U. Nam, Y.S. Hwang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 186 KB

english, 2002

36

Kinetic and mechanistic study on the chemical vapor deposition of titanium dioxide thin films by in situ FT-IR using TTIP

Kyoung-Ho Ahn, Young-Bae Park, Dong-Wha Park

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 227 KB

english, 2002

37

Spectroscopic study for pulsed DC plasma nitriding of narrow deep holes

Yong M. Kim, Jeon G. Han

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 529 KB

english, 2002

38

Optical measurements of gas temperatures in atmospheric pressure RF cold plasmas

J.H. Kim, Y.H. Kim, Y.H. Choi, W. Choe, J.J. Choi, Y.S. Hwang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 279 KB

english, 2002

39

Measurement of ion temperature in ECR Ar/N2 plasma

Mayuko Koga, Akira Yonesu, Yoshinobu Kawai

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 141 KB

english, 2002

40

Measurement of electron temperature and plasma density in coplanar AC plasma display panels

Iil Ryong Cho, Min Wug Moon, Choong Gon Ryu, Pil Ryong Oh, Yoon Jung, Myung Chul Choi, Han Sup Uhm, Eun Ha Choi

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 265 KB

english, 2002

41

Paradoxical sheath width variation in transversely magnetized capacitive coupled plasma

S.J. You, K.H. Bai, J.H. In, H.Y. Chang, C.K. Choi

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 372 KB

english, 2002

42

Diagnostics of neutral species in the low-angle forward-reflected neutral beam etching system

M.J. Chung, D.H. Lee, G.Y. Yeom

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 203 KB

english, 2002

43

The study of atmospheric pressure plasma for surface cleaning

C.H. Yi, Y.H. Lee, G.Y. Yeom

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 102 KB

english, 2002

44

Plasma boronitriding of WC(Co) substrate as an effective pretreatment process for diamond CVD

W.D. Man, J.H. Wang, Z.B. Ma, C.X. Wang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.15 MB

english, 2002

45

Plasma-treatment of MgO film in a.c. plasma display

Sung Ha Lee, Byung Joon Rhee, Min Ho Joo, Jungwon Kang, Jae Sang Chung, Myung-Ho Park

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 803 KB

english, 2002

46

Plasma processing of materials for medical applications

In-Seop Lee, Jong-Chul Park, Young-Hee Lee

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 252 KB

english, 2002

47

Surface modification of natural leather using low-pressure parallel plate plasma

Jai Hyuk Choi, Eung Suok Lee, Hong Koo Baik, Se-Jong Lee, Ki Moon Song, Myung Keun Hwang, Chang Su Huh

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.66 MB

english, 2002

48

Application of multi-ion beam enhanced deposition

Guoqing Li, Cuiyan, Tao Zhang, Zongxin Mu, Liang Wang, Zukun Hei

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 93 KB

english, 2002

49

Effect of N-containing additive gases on global warming gas emission during remote plasma cleaning process of silicon nitride PECVD chamber using C4F8/O2/Ar chemistry

C.H. Oh, N.-E. Lee, J.H. Kim, G.Y. Yeom, S.S. Yoon, T.K. Kwon

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 151 KB

english, 2002

50

Dry etching characteristics of (Ba0.6,Sr0.4)TiO3 thin films in high density CF4/Ar plasma

Pil-Seung Kang, Kyoung-Tae Kim, Dong-Pyo Kim, Chang-Il Kim, Alexander M. Efremov

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 190 KB

english, 2002

51

Sapphire etching with BCl3/HBr/Ar plasma

C.H. Jeong, D.W. Kim, H.Y. Lee, H.S. Kim, Y.J. Sung, G.Y. Yeom

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 396 KB

english, 2002

52

Influence of substrate temperature on the etching of silver films using inductively coupled Cl2-based plasmas

S.D. Park, Y.J. Lee, S.G. Kim, H.H. Choe, M.P. Hong, G.Y. Yeom

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 522 KB

english, 2002

53

High aspect ratio via etching conditions for deep trench of silicon

W.J. Park, J.H. Kim, S.M. Cho, S.G. Yoon, S.J. Suh, D.H. Yoon

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.27 MB

english, 2002

54

The mechanical properties of the SiOC(H) composite thin films with a low dielectric constant

Hean Ju Lee, Kyoung Suk Oh, Chi Kyu Choi

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 166 KB

english, 2002

55

Cold arc-plasma jet under atmospheric pressure for surface modification

Jungo Toshifuji, Takashi Katsumata, Hirofumi Takikawa, Tateki Sakakibara, Ichiro Shimizu

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 643 KB

english, 2002

56

Multi-jet atmospheric glow plasma cleaning of ablation debris from micro-via drilling process

Eung Suok Lee, Hae Il Park, Hong Koo Baik, Se-Jong Lee, Kie Moon Song, Myung Keun Hwang, Chang Su Huh

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.83 MB

english, 2002

57

Surface modification for hydrophilic property of stainless steel treated by atmospheric-pressure plasma jet

M.C. Kim, D.K. Song, H.S. Shin, S.-H. Baeg, G.S. Kim, J.-H. Boo, J.G. Han, S.H. Yang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1019 KB

english, 2002

58

Decontamination of radioactive metal surface by atmospheric pressure ejected plasma source

Yong-Hwan Kim, Yoon-Ho Choi, Ji-Hun Kim, Jongkyu Park, Won-Tae Ju, Kwang-Hyun Paek, Y.S. Hwang

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 298 KB

english, 2002

59

Effects of discharge pulsing on the cleaning of surfaces using a dielectric barrier discharge at atmospheric pressure

Yoon-Kee Kim, Marko Eichler, Claus-Peter Klages

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 273 KB

english, 2002

60

Air mesh plasma for PCB de-smear process

Eung Suok Lee, Hae II Park, Hong Koo Baik, Se-Jong Lee, Kie Moon Song, Myung Keun Hwang, Chang Su Huh

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 1.06 MB

english, 2002

61

Author Index

Journal:

Surface and Coatings Technology

Year:

2002

File:

PDF, 40 KB

2002

62

Subject Index

Journal:

Surface and Coatings Technology

Year:

2002

Language:

english

File:

PDF, 70 KB

english, 2002

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