Uniformity of VHF plasma produced with ladder shaped...

Surface and Coatings Technology 2002 Vol. 171; Iss. 1-3

Uniformity of VHF plasma produced with ladder shaped electrode

Hiroshi Mashima, Yoshiaki Takeuchi, Matsuhei Noda, Masayoshi Murata, Hiroshi Naitou, Ikutaro Kawasaki, Yoshinobu Kawai
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Volume:
171
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0257-8972(03)00264-0
File:
PDF, 792 KB
english, 2002
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