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Intense plasma pulses: two modes of the use for surface processing purposes
J. Piekoszewski, J. Langner, L. Waliś, Z. WernerVolume:
93
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(97)00046-7
File:
PDF, 327 KB
english, 1997