Volume 93; Issue 2-3

Surface and Coatings Technology

Volume 93; Issue 2-3

1

Metal plasma immersion ion implantation and deposition: a review

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 1000 KB

english, 1997

2

Broad metal ion and plasma beams techniques TAMEK for material surface modification

Alexander Tolopa

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 623 KB

english, 1997

3

Characteristic features of an apparatus for plasma immersion ion implantation and physical vapour deposition

W. Ensinger, J. Klein, P. Usedom, B. Rauschenbach

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 444 KB

english, 1997

4

Characterisation of high voltage pulser performance in radiofrequency plasmas

G.A. Collins, K.T. Short, J. Tendys

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 551 KB

english, 1997

5

Sheath assisted nitrogen ion implantation and diffusion hardening for surface treatment of metals

S. Mukherjee, P.I. John

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 364 KB

english, 1997

6

Commercial plasma source ion implantation facility

J.T. Scheuer, K.C. Walter, R.A. Adler, W.G. Horne

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 401 KB

english, 1997

7

Plasma immersion ion implantation using pulsed plasma with d.c. and pulsed high voltages

Jörg Brutscher, Reinhard Günzel, Wolfhard Möller

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 538 KB

english, 1997

8

A pulsed inductively coupled plasma source for plasma-based ion implantation

M. Tuszewski, J.T. Scheuer, R.A. Adler

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 530 KB

english, 1997

9

Intense plasma pulses: two modes of the use for surface processing purposes

J. Piekoszewski, J. Langner, L. Waliś, Z. Werner

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 327 KB

english, 1997

10

Sputter and diffusion processes in a plasma immersion device

H. Bender, J. Halder, F. Hilschert, H. Klein, J. Schäfer, B. Seiler, R. Thomae

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 323 KB

english, 1997

11

Application of the ECR slot antenna plasma source for ion implantation

D. Korzec, V. Raiko, J. Engemann, R. Günzel, J. Brutscher, W. Möller

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 668 KB

english, 1997

12

Simulation of plasma-based ion implantation of a sawtooth target

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 396 KB

english, 1997

13

Measured and calculated dose distribution for 2D plasma immersion ion implantation

S. Mändl, H. Reuther, J. Brutscher, R. Günzel, W. Möller

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 432 KB

english, 1997

14

Ion energy distribution in plasma immersion ion implantation

S. Mändl, J. Brutscher, R. Günzel, W. Möller

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 367 KB

english, 1997

15

Short pulse plasma immersion ion implantation of oxygen into silicon: determination of the energy distribution

N.P. Barradas, A.J.H. Maas, S. Mändl, R. Günzel

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 373 KB

english, 1997

16

Incident ion monitoring during plasma immersion ion implantation by direct measurements of high-energy secondary electrons

K. Nakamura, S. Mändl, J. Brutscher, R. Günzel, W. Möller

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 437 KB

english, 1997

17

Boron doping of silicon by plasma source ion implantation

R.J. Matyi, D.L. Chapek, D.P. Brunco, S.B. Felch, B.S. Lee

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 665 KB

english, 1997

18

Shallow junction formation by plasma immersion ion implantation

Jiqun Shao, Erin C. Jones, Nathan W. Cheung

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 275 KB

english, 1997

19

Irradiation of silicon with a pulsed plasma beam containing Mo ions

J. Piekoszewski, Z. Werner, J. Langner, M. Janik-Czachor

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 227 KB

english, 1997

20

Polymer surface modification by plasma source ion implantation

Seunghee Han, Yeonhee Lee, Haidong Kim, Gon-ho Kim, Junghye Lee, Jung-Hyeon Yoon, Gunwoo Kim

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 279 KB

english, 1997

21

Ion implantation based on the uniform distributed plasma

Frédéric Le Coeur, Yves Arnal, Rudolf R. Burke, Olivier Lesaint, Jacques Pelletier

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 391 KB

english, 1997

22

Electrical characterization of silicon nitride produced by plasma immersion ion implantation

S.-M. Chen, J.M. Shannon, R.M. Gwilliam, B.J. Sealy

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 441 KB

english, 1997

23

Industrial applications of plasma immersion ion implantation

C. Blawert, B.L. Mordike

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 576 KB

english, 1997

24

Diamond-like carbon coating for aluminum 390 alloy — automotive applications

Gerard W. Malaczynski, Aboud H. Hamdi, Alaa A. Elmoursi, Xiaohong Qiu

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 751 KB

english, 1997

25

Adherent diamond-like carbon coatings on metals via plasma source ion implantation

K.C. Walter, M. Nastasi, C. Munson

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 529 KB

english, 1997

26

Noble metal cathodic arc implantation for corrosion control of Ti-6A1-4V

Steve Meassick, Harvey Champaign

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 417 KB

english, 1997

27

Treatment of various surface treated layers by plasma immersion ion implantation

C. Blawert, B.L. Mordike, A. Weisheit

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 745 KB

english, 1997

28

Characterization of Ti-6A1-4V modified by nitrogen plasma immersion ion implantation

F. Alonso, M. Rinner, A. Loinaz, J.I. Oñate, W. Ensinger, B. Rauschenbach

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 413 KB

english, 1997

29

Radio-frequency plasma nitriding and nitrogen plasma immersion ion implantation of Ti-6A1-4V alloy

S.Y. Wang, P.K. Chu, B.Y. Tang, X.C. Zeng, Y.B. Chen, X.F. Wang

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 341 KB

english, 1997

30

Depth profilometry of sputtered Ni ions implanted in Ti using pulsed argon and nitrogen plasmas

A.H. Sarkissian, L. Cliche, E. Paradis, J.B. Leblanc

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 306 KB

english, 1997

31

Modification of the outgassing rate of stainless steel surfaces by plasma immersion ion implantation

B. Garke, Chr. Edelmann, R. Günzel, J. Brutscher

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 689 KB

english, 1997

32

Electron-beam and ion-beam treatment of protective coatings produced by ion plating

Yu.D. Yagodkin, K.M. Pastuhov, S.A. Muboyadjyan

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 383 KB

english, 1997

33

Combination of ion implantation and film deposition for forming an antifriction wear-resistant carbon coating

V.V. Uglov, V.V. Khodasevich, D.P. Rusalsky, A. Koeniger, K. Hammerl, B. Rauschenbach

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 432 KB

english, 1997

34

Influence of deposition regimes on structure of ion-plated coatings

E.N. Kablov, S.A. Muboyadjyan, S.A. Budenovskiy, Yu.D. Yagodkin, K.M. Pastuhov

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 377 KB

english, 1997

35

PIII-assisted thin film deposition

S. Schoser, J. Forget, K. Kohlhof

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 406 KB

english, 1997

36

Preface

Wolfhard Möller

Journal:

Surface and Coatings Technology

Year:

1997

Language:

english

File:

PDF, 84 KB

english, 1997

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