![](/img/cover-not-exists.png)
Shallow junction formation by plasma immersion ion implantation
Jiqun Shao, Erin C. Jones, Nathan W. CheungVolume:
93
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0257-8972(97)00055-8
File:
PDF, 275 KB
english, 1997