Temperature control for the gate workfunction engineering...

Solid-State Electronics 2015 / 12 Vol. 114

Temperature control for the gate workfunction engineering of TiC film by atomic layer deposition

Kim, Choong-Ki, Ahn, Hyun Jun, Moon, Jung Min, Lee, Sukwon, Moon, Dong-II, Park, Jeong Soo, Cho, Byung-Jin, Choi, Yang-Kyu, Lee, Seok-Hee
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Volume:
114
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2015.07.011
Date:
December, 2015
File:
PDF, 1.10 MB
english, 2015
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