Formation of a denuded zone in nitrogen-doped Czochralski...

Semiconductor Science and Technology 2005 / 02 Vol. 20; Iss. 2

Formation of a denuded zone in nitrogen-doped Czochralski silicon wafer treated by ramping anneals

Gong, Longfei, Ma, Xiangyang, Tian, Daxi, Fu, Liming, Yang, Deren
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
20
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/20/2/022
Date:
February, 2005
File:
PDF, 468 KB
english, 2005
Conversion to is in progress
Conversion to is failed