Resistive pressure sensing structures on polyimide membranes on GaAs substrate
Petrini, Ioana, Müller, A, Avramescu, V, Simion, G, Nitescu, N, Vasilache, D, Dascalu, D, Konstantinidis, G, Giacomozzi, FVolume:
10
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/10/2/320
Date:
June, 2000
File:
PDF, 148 KB
english, 2000