Influence of Ge implantation on the mechanical properties of polycrystalline silicon microstructures
Polymenakos, Stylianos, Stergiou, Vassiliki C, Kontos, Athanassios G, Tsamis, Christos, Raptis, Yannis S, Tsoukalas, DimitrisVolume:
12
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/12/4/318
Date:
July, 2002
File:
PDF, 380 KB
english, 2002