Linear and nonlinear free vibrations of electrostatically...

Microsystem Technologies 2017 / 1 Vol. 23; Iss. 1

Linear and nonlinear free vibrations of electrostatically actuated micro-/nanomechanical resonators

Liu, Weijia, Wu, Baisheng, Lim, C. W.
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Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2731-0
Date:
January, 2017
File:
PDF, 1.15 MB
english, 2017
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