Volume 23; Issue 1

Microsystem Technologies

Volume 23; Issue 1
4

Research on the non-ideal dynamics of a dual-mass silicon micro-gyroscope

Year:
2017
Language:
english
File:
PDF, 2.65 MB
english, 2017
13

Fabrication of MEMS xylophone magnetometer by anodic bonding technique using SOI wafer

Year:
2017
Language:
english
File:
PDF, 1.67 MB
english, 2017
20

Multi-source multi-terminal reliability evaluation of interconnection networks

Year:
2017
Language:
english
File:
PDF, 1.31 MB
english, 2017