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Electric field and induced charges distribution model for MEMS strip-type sensing electrodes
Yigeng Fang,Chunrong Peng,Pengfei Yang,Dongming Fang…Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2745-7
Date:
January, 2017
File:
PDF, 1.59 MB
english, 2017