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Modeling and Optimal Design of a Glass RTP System
Kim, Junghwan, Lee, Jongyeop, Ji, Sanghyun, Lee, Sungyong, Lee, Kwang SoonVolume:
28
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2015.2480743
Date:
November, 2015
File:
PDF, 1.30 MB
english, 2015