IEEE Transactions on Semiconductor Manufacturing

1

Novel Approaches to Optimizing Carrier Logistics in Semiconductor Manufacturing

Rothe, Jan, Gaxiola, Gabriel, Marshall, Les, Asakawa, Terry, Yamagata, Kenji, Yamamoto, Makoto

Journal:

Year:

2015

Language:

english

File:

PDF, 1.07 MB

english, 2015

2

Feedback Control System of Wafer Temperature for Advanced Plasma Processing and its Application to Organic Film Etching

Tsutsumi, Takayoshi, Fukunaga, Yusuke, Ishikawa, Kenji, Takeda, Keigo, Kondo, Hiroki, Ohta, Takayuki, Ito, Masafumi, Sekine, Makoto, Hori, Masaru

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 1.28 MB

english, 2015

3

Modeling and Optimal Design of a Glass RTP System

Kim, Junghwan, Lee, Jongyeop, Ji, Sanghyun, Lee, Sungyong, Lee, Kwang Soon

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 1.30 MB

english, 2015

4

Manufacturing Yield for Multiple Lines Gold Bumping Processes With Asymmetric Tolerances

Tai, Y. T.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 1.16 MB

english, 2015

5

Tristate Inverter Array: A New Technology Development Yield Learning Vehicle Complementing Traditional SRAM Arrays

Ahsan, Ishtiaq, Schiller, Carl, Towler, Fred, Song, Zhigang, Wong, Robert, Clark, David, Lucarini, Stephen, Beaudoin, Felix

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 1.75 MB

english, 2015

6

Yield Prediction Through the Event Sequence Analysis of the Die Attach Process

Lee, Hoyeop, Kim, Chang Ouk, Ko, Hyo Heon, Kim, Min-Kyoon

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 1.39 MB

english, 2015

7

Optimization of Re-Entrant Hybrid Flows With Multiple Queue Time Constraints in Batch Processes of Semiconductor Manufacturing

Arima, Sumika, Kobayashi, Akihiro, Wang, Yi-Fan, Sakurai, Kazuho, Monma, Yusuke

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 2.24 MB

english, 2015

8

Non-Contact, Sub-Surface Detection of Alloy Segregation in Back-End of Line Copper Dual-Damascene Structures

Nag, Joyeeta, Ray, Shishir, Kohli, Kriteshwar K., Simon, Andrew H., Cohen, Brian A., Tijiwa-Birk, Felipe, Parks, Christopher J., Krishnan, Siddarth A.

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 566 KB

english, 2015

9

Special Section on the 2014 SEMI Advanced Semiconductor Manufacturing Conference

Patterson, Oliver D., Werbaneth, Paul, Braggin, Jennifer, Radloff, Stefan

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 201 KB

english, 2015

10

Seventeenth IEEE International Vacuum Electronics Conference (IVEC 2016)

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

File:

PDF, 1.10 MB

2015

11

Introducing IEEE Collabratec

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

File:

PDF, 1.88 MB

2015

12

Member Get-A-Member (MGM) Program

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

File:

PDF, 3.27 MB

2015

13

Imagine a teenager excited about technology

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

File:

PDF, 487 KB

2015

14

Is a computing career right for you?

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

File:

PDF, 402 KB

2015

15

Dual-Frequency Megasonic Waveguide for Nano-Pattern Cleaning

Kim, Hyunse, Lee, Yanglae, Lim, Euisu

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

Language:

english

File:

PDF, 1.29 MB

english, 2015

16

2016 IEEE International Interconnect Technology Conference (IITC)

Journal:

IEEE Transactions on Semiconductor Manufacturing

Year:

2015

File:

PDF, 758 KB

2015

17