Study of As precipitates in LEC SI–GaAs wafer by Raman...

Materials Science and Engineering: B 2000 Vol. 75; Iss. 2-3

Study of As precipitates in LEC SI–GaAs wafer by Raman probe

Fengyi Zhang, Hailing Tu, Yonghong Wang, Jiayu Qian, Haitao Wang, Jing Wang, Ping Song
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Volume:
75
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(00)00349-4
File:
PDF, 316 KB
english, 2000
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