Low-temperature solid-phase crystallization of a-Si1−xGex on SiO2 by ion-beam stimulation
Isao Tsunoda, Tomohiro Nagata, Atsushi Kenjo, Taizoh Sadoh, Masanobu MiyaoVolume:
89
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(01)00770-x
File:
PDF, 201 KB
english, 2002