Characterization of low temperature epitaxial Si and...

Materials Science and Engineering: B 2002 Vol. 89; Iss. 1-3

Characterization of low temperature epitaxial Si and Si1−yCy films grown by hot wire cell method

Tatsuro Watahiki, Katsuya Abe, Hajime Tamura, Shinsuke Miyajima, Akira Yamada, Makoto Konagai
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
89
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(01)00772-3
File:
PDF, 130 KB
english, 2002
Conversion to is in progress
Conversion to is failed