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Effect of annealing environment on antimony redistribution in pseudomorphic Si/SiGe/Si〈Sb〉 heterostructures
V.S. Avrutin, M.Yu. Barabanenkov, N.F. Izyumskaya, A.N. Pustovit, A.F. Vyatkin, N.N. LoikoVolume:
89
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(01)00791-7
File:
PDF, 309 KB
english, 2002