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Photoluminescence study of {311}defect-precursors in self-implanted silicon
H. Tsuji, R. Kim, T. Hirose, T. Shano, Y. Kamakura, K. TaniguchiVolume:
91-92
Year:
2002
Language:
english
Pages:
3
DOI:
10.1016/s0921-5107(01)00964-3
File:
PDF, 108 KB
english, 2002