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Analysis of extended defects in nitrogen annealed CZ silicon by optical and electron beam methods
C. Frigeri, M. Ma, T. Irisawa, T. OgawaVolume:
91-92
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(01)00985-0
File:
PDF, 221 KB
english, 2002