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Annealing effect and impurity doping effects on the defect generation in interstitial-rich Si crystals observed by infrared microscope
Kazutaka Terashima, Suzuka NishimuraVolume:
91-92
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(01)00987-4
File:
PDF, 234 KB
english, 2002