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Photoacoustic evaluation of defects and thermal conductivity in the surface layer of ion implanted semiconductors
Nobuya Takabatake, Takeshi Kobayashi, Yoshiyuki Show, Tomio IzumiVolume:
91-92
Year:
2002
Language:
english
Pages:
3
DOI:
10.1016/s0921-5107(01)00989-8
File:
PDF, 131 KB
english, 2002