Full wafer non-contact mapping of electrical properties of ultra-thin advanced dielectrics on Si
Piotr Edelman, Jacek Lagowski, Alexandre Savtchouk, Marshall Wilson, Andrey Aleynikov, Dmitriy Marinskiy, Joaquin NavarroVolume:
91-92
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(01)00995-3
File:
PDF, 287 KB
english, 2002