Photoenhanced wet chemical etching of n+-doped GaN

Materials Science and Engineering: B 2002 Vol. 91-92; Iss. none

Photoenhanced wet chemical etching of n+-doped GaN

J. Škriniarová, A. van der Hart, H.P. Bochem, A. Fox, P. Kordoš
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Volume:
91-92
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(01)01040-6
File:
PDF, 344 KB
english, 2002
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