Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors
Joseph J. Kopanski, Jay F. Marchiando, Jeremiah R. LowneyVolume:
44
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0921-5107(96)01797-7
File:
PDF, 617 KB
english, 1997