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Characterization by atomic force microscopy of the SOI layer topography in low-dose SIMOX materials
C. Guilhalmenc, H. Moriceau, B. Aspar, A.J. Auberton-Hervé, J.M. LamureVolume:
46
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(96)01926-5
File:
PDF, 376 KB
english, 1997