CNx thin films prepared by laser chemical vapor deposition
F. Falk, J. Meinschien, G. Mollekopf, K. Schuster, H. StafastVolume:
46
Year:
1997
Language:
english
Pages:
3
DOI:
10.1016/s0921-5107(96)01938-1
File:
PDF, 306 KB
english, 1997